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Plasma Enhanced Chemical Vapor Deposition System
| Heat Module |
Max. Temp.: 1200oC Heating Zone: 270 mm Constant Heating Zone: 100 mm Tube Size: 60 mm (dia) x 1250 mm (lenght) |
|---|---|
| RF Power Module |
Output Power: 0 - 300 W Stability: +/- 0.1% Frequency: 13.56 MHz Max. Reverse Power: 120 W |
| Vacuum Module |
< 50 Pa for low vacuum module < 1 Pa for medium vacuum module < 0.005 Pa for high vacuum module |
| Gas Mixing Module |
up to 4 channels with digital displayed mass flow meter Gas Flow Range: 0 - 200 sccm Gas Flow Accuracy: +/- 1.5% F.S. |
| Temperature Control |
PID Control - self-tuning 30 Segments Program N-type Thermal Couple Temperature Accuracy: +/- 1oC |
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